1、MEMS microphone chip inspection industry status
——Image quoted from the Myms Consulting report
2、Principles of light field technology
Simply put, the collection of space light is the light field, and we are surrounded by the light field all the time. A complete description of the light field requires seven parameters, the position of the light (x, y, z), the direction (θ, H), the wavelength (λ) and the time (t). When the light field propagates in the transparent medium of air, its spatial position can be accurately determined by the position of two points formed by the intersection of the light and two parallel planes. The main lens and the microlens of the light field camera are equivalent to two parallel planes, and the refraction of a line through the two lenses records the intensity, position and direction of the line.
——Image quoted from "Li Haotian et al. 2018. Surface Pressure Measurement Technology Based on 3D reconstruction of Light Field and PSP"
The VOMMA light-field camera uses a combination of ultra-high resolution microlenses with CMOS, and its dense array of microlenses, similar to the compound eye of a dragonfly, can refract light from all directions of an object into different pixels, thus recording all three-dimensional light passing through the main lens. The light can be retraced through the software processing, and the focus plane can be changed freely, and the Angle of view can be switched and three-dimensional imaging can be made. Therefore, a single VOMMA light-field camera can achieve the imaging effect of multiple traditional cameras around shooting, namely“Single camera, one shot, multiple focus, multiple viewing angles, 3D measurement/modeling”。
Dragonfly compound eye
VOMMA light field camera profile
一次拍摄,多重聚焦
One shot, multiple perspectives
3、MEMS microphone chip detection difficulties
At present, most MEMS microphones chip gold wire detection adopts 2D detection scheme of human eye microscope observation. 2D detection scheme can solve the problems of missing welding, missing wire, parallel wire, broken wire, etc., but it does not have a particularly good observation effect for the problems of gold pin, falling wire, etc., and the observation efficiency of human eyes is low, leading to the instability of chip detection productivity.
Traditional chip gold wire detection method
4、VOMMA solution
The VOMMA chip detection project is aimed at the existing detection difficulties, relying on the unique three-dimensional imaging technology of light field, through a single shot of the light field camera, output the three-dimensional contour data of the gold wire, efficient and accurate judgment of the good quality of the chip gold wire, and put forward a detection scheme that can achieve multi-angle and all-round observation effect. A single gold wire detection time is only 0.5s, which greatly improves the speed and accuracy of chip detection.
Chip gold wire 3D profile data
(VOMMA light field camera single shot)
VOMMA optical field camera chip 3D detection system diagram
5、MEMS microphone chip gold wire detection effect display
Normal gold wire
Missing thread - Missing gold thread
Broken wire -- the gold wire is broken
Drop line - The gold line outline is lower than normal height
Feet up - Gold line outline above normal height