VOMMA(Shanghai) Technology Co., Ltd

Micro optical field imaging system

Micro optical field imaging system

-3D detection of semiconductor chip
-3D detection of biological tissues and cells
Service Hotline:

+86-021-54473021

SeriesLFM0104
TypesA01B01C01D01E01
FOV(mm)11.1×7.65.5×3.84.4×3.02.2×1.51.1×0.8
WD(mm)56.42025.540.6
DOF(mm)30.780.480.120.036

Absolute Accuracy 

(μm)

Focal PlaneCentral ViewX/Y17.99.76.44.41.7
Z*25.27.23.10.90.4

Repeatability 

(μm)

Focal PlaneCentral ViewX/Y0.153.420.110.030.01
Z*0.510.191.010.120.33
Depth Map Calculation Time38ms~100ms

Absolute Accuracy Z*:Describes the measurement accuracy of the 3D camera, expressed by the deviation of the Z-axis height difference measured by the system from the true value. 

Repeatability Z*:Describes the closeness between the results obtained by short-term continuous measurement of the same Z-axis dimension under the same conditions, expressed by three times the standard deviation of all measurement results.


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